Benchmark is the world’s leading independent supplier of test reticles for lithography systems. For almost four decades, our test reticles have been used by wafer fabs, and materials and fab equipment suppliers to optimize and monitor lithography performance and processes.
Grating and Phasemasks
Quantitative Phase Target
Benchmark provides analysis software packages to enhance its test reticle offerings such as Phase Shift Focus Monitor and Universal matching reticles. These packages can also be enhanced and integrated for routine tool monitoring.