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Innovative Expertise

Leveraging decades of experience in design and manufacturing to deliver your patterned substrate solutions.

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Customer Commitment

Our team has established a broad and loyal customer base through consistent performance beyond expectations.

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Timely Communication

New and established customers, both large and small, rely on Benchmark for rapid responses to all inquiries.

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Who We Are

We are a diverse team of engineering and fabrication professionals with expertise in providing unique micro and nano-patterned substrate solutions for a wide variety of applications in the semiconductor, photonics, pharma industries.

Learn more… Products

What We Do

Starting from our initial core business of standard test reticles and associated software for semiconductor wafer lithography, we also offer a variety of other custom made-to specification patterned substrates for nano-imprinting and micro-replication, grating based waveguides, FBG phase masks, position calibration artifacts and conventional photomasks.

Our Services

We specialize in leveraging the unique patterning capability of the photomask and semiconductor industries to realize unique patterned substrates for wide variety of applications.

Learn more… Services

Upcoming Tradeshows and Conferences

  • Photonics West 2025
    • January 28-30, 2025
    • San Francisco, CA – Moscone Convention Center
    • Booth #4028
  • Advance Lithography 2025
    • February 25-26, 2025
    • San Jose, CA – McEnery Convention Center
    • Booth #419