Position Calibration Wafers

Benchmark offers a standard position calibration wafer with patterned oxide on 300mm or 200mm silicon. We offer the 300mm product in quantities as few as a single wafer. We maintain a small inventory of the 300mm wafers for quick response time. Contact us for availability of 200mm if desired.

The wafer pattern for both 300mm and 200mm is comprised of position and pre-shifted overlay measuring elements that repeat every 5mm in X and Y. The central die is surrounded by a frame for easy identification of the wafer center. The wafer also features critical dimension targets from 1um to 20um every 15mm in X and Y to allow for use in other applications. Repeating 5mm die pattern is shown below.

For more information contact us