Gratings and Phasemasks

Benchmark Technologies is a leading supplier of direct write grating-based binary and phase shifted masks and micro/nano replication masters. Our broad and deep understanding of e-beam writers used for fine feature patterning of semiconductor masks and wafers allows us to leverage this infrastructure at sub-0.1nm pitch resolution to provide a wide array of amplitude and phase grating-based products including grating-based waveguides and Fiber Bragg Grating phasemasks. We have developed proprietary software to enable complex layout and fabrication of simple binary uniform gratings, linear chirped, non-linear chirped, curved, radial, phase jump and other arbitrary grating embodiments.

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Example below shows various pitches, etch depth and angles on a single substrate.