Reticle

Save Time: How?

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Makes determining best focus and lens/system performance easier, faster and more reliable.

Uses automated data collection.

Allows rapid determination of lens aberrations, for analysis of new or existing stepper equipment.

Allows rapid evaluation of lens heating effects.

No Focus Matrix Required.

Compatible with virtually all types and models of stepper equipment.

Collects data on a wide variety of system characteristics.

Gathers data under practical processing conditions.

Eliminates the need for several wafers to be exposed.

Allows rapid evaluation using standard electrical probing equipment.

Automatically collects data using standard probing equipment.

Collects data on a wide variety of system characteristics.

Gathers a wide variety of data for rapid evaluation of processes.

Collects data on a wide variety of system characteristics.

Allows quick analysis of system resolution, as well as other types of data on system performance.

Is compatible with virtually all types and models of stepper equipment.

Rapidly determines stepper best focus without the use of a microscope.

Eliminates operator subjectivity.

Optimizes stepper utilization to reduce cost of ownership.

Permits system-to-system matching for virtually all types of stepper equipment.

Uses built-in stepper metrology.

Matches present stepper equipment for evaluating prior to purchase, or qualifying against existing tools.