Benchmark Technologies and its fabrication partner, Holographix LTD have teamed up to provide a complete solution for delivering replicated nano imprint templates. Leveraging Holographix’ proprietary polymer replication technology and Benchmark Technologies’ broad experience in master patterning fabrication strategies, this combination provides for a single interface for pattern CAD, template layout, mastering and replication.

Imprint Templates

Imprint lithography has proven itself as a means for fabrication of nanostructures and continues to be investigated and adopted for a wide variety of applications including life sciences, data storage, opto-electronics and semiconductor. The Benchmark-Holographix team provides a unique combination of fabrication services to meet the growing needs of this customer base. Our replicated templates provide a lower cost alternative and reduce risk of damage associated with using the original template for nanofabrication.

Master Fabrication

Benchmark Technologies can take your project from the concept stage through design and layout and implement the right technology for realizing the ideal master to feed the replication process.

We have broad experience on advanced patterning and can provide access for our customers to a variety of master fabrication technologies including:

• Silicon-based masters using 193nm scanner lithography

• Silicon-based masters using Gaussian e-beam lithography

• Quartz-based masters using shaped e-beam lithography

• Quartz-based masters using Gaussian e-beam lithography

Template Characteristics

• Feature resolution: <10 nanometers

• Maximum feature size: 100 microns

• Optical transmission: >99% from 420 nm to 2.2 µm

• Temperature range: -100C to 200º C

• Humidity range: 0 to 95% continuous

• Chemical resistance: impervious to degradation by solvent, acid, and alkaline environments

• Available as polymer on glass for UV-NIL Applications

  • 4 inch to 6 inch square

  • 4 inch to 6 inch diameter quartz wafers

Download Brochure (PDF)

For more information on Template replication contact us.